50~250ms
Proprietary SG-PID algorithm
Super 2-degree-of-freedom PID with variable sampling
Variable sampling control
TEMPERATURE CONTROL SOLUTION
M74 seriesMore precision.
Smarter control.
High-performance temperature control for semiconductor equipment. M74 series supports equipment stability and productivity.
M74 series Highlights
±0.01℃
Precision for fine temperature changes
M74P high-precision control
or less control precision
70%
Industry-leading compact size
Compact construction for efficient panel layouts
Volume compared with competing products
31modules
Connected as one system
Modbus TCP · Auto mapping · I/O expansion
Maximum connections per M74C
PRODUCT LINEUP
Products
Find the product family for your application.
Modular
M74 series
Multi-channel modular design Advanced temperature controllers
Advanced
T50 series
Advanced functions Precision control Modbus communication
Standard
T30 series
Easy operation Precision control Advanced timer functions
PCB type (M74)
N74
4-channel input/output isolation Modbus communication
PCB type (T50)
N50
Advanced functions Precision control Modbus communication
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